Influence of Substrate Etching on Structural and Optical Properties of ZnO Nanorods Grown by Hydrothermal Method

摘要

ZnO nanostructures were prepared on Si and AlN substrates with and without etching by hydrothermal method. The influences of substrate etching on the morphology and structure were investigated by scanning electron microscopy, X-ray diffraction, Raman microscopy, and photoluminescence spectrum. The results show that the morphology and the photoluminescence properties of ZnO nanorods are significantly influenced by substrate etching.