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Silicon Float Zone Single Crystal Automatic Growth

机译:硅浮区单晶自动生长

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摘要

As basis of the big diameter crystal development, the single crystal automatic growth is the most important technique for system standardization and mass production. In this article, author introduced a new useful way for the single crystal automatic growth of float zone. By setting the growth interval and controlling parameter, PLC controller could automatically control the single crystal growth when the single crystal's diameter is greater than 50mm. This method applied to the machine system can greatly reduce the fault of manual operation as well as labor intensity. Also it improved the single crystal quality which increases the ability to develop big diameter single crystal in the future.
机译:作为大直径晶体发育的基础,单晶自动增长是系统标准化和批量生产的最重要技术。在本文中,作者对浮区的单晶自动生长介绍了一种新的有用方式。通过设置生长间隔和控制参数,PLC控制器可以在单晶的直径大于50mm时自动控制单晶生长。该方法应用于机器系统可以大大减少手动操作的故障以及劳动强度。它还提高了单晶质量,这增加了未来发展大直径单晶的能力。

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