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Role of Carbonates in Scavenging Hydroxyl Radicals Generated During Megasonic Irradiation of Wafer Cleaning Solutions (PPT)

机译：碳酸盐在晶圆清洁解决方案甲型辐照中产生的清除羟基自由基的作用（PPT）

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Introduction 2 Key Objective and Approach 3 Experimental Setup 4 Results and Discussion 5 Fluorescence Spectroscopy 6 Sono-electrochemical sensor Studies 7 Summary.

机译：简介2关键目标和方法3实验设置4结果与讨论5荧光光谱6超声电化学传感器研究7摘要。

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《SEMATECH Surface Preparation and Cleaning Conference 》|2014年||共10页
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R. Balachandran; M. Zhao; I. Brown;
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中图分类工程材料学 ;
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1. Role of ammonia and carbonates in scavenging hydroxyl radicals generated during megasonic irradiation of wafer cleaning solutions [J] . Rajesh Balachandran, Mingrui Zhao, Bingfeng Dong, Microelectronic Engineering . 2014 ,第nova期

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2. Measurement of hydroxyl radicals in wafer cleaning solutions irradiated with megasonic waves [J] . M. Keswani, S. Raghavan, R. Govindarajan, Microelectronic Engineering . 2014 ,第apra期

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3. Evaluation of very dilute alkaline solutions for wafer cleaning with megasonic irradiation [J] . Jeong J.-H., Kang B.-K., Kim M.-S., Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena . 2013 ,第Null期

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4. Role of Carbonates in Scavenging Hydroxyl Radicals Generated During Megasonic Irradiation of Wafer Cleaning Solutions (PPT) [C] . R. Balachandran, M. Zhao, I. Brown SEMATECH Surface Preparation and Cleaning Conference . 2014

机译：碳酸盐在晶圆清洁解决方案甲型辐照中产生的清除羟基自由基的作用（PPT）
5. Megasonic cleaning of wafers in electrolyte solutions: Possible role of electro-acoustic and cavitation effects [D] . Keswani, Manish 2008

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6. Environmentally Persistent Free Radicals (EPFRs) - 2. Are Free Hydroxyl Radicals Generated in Aqueous Solutions? [O] . Lavrent Khachatryan, Barry Dellinger -1

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7. MEGASONIC CLEANING OF WAFERS IN ELECTROLYTE SOLUTIONS: POSSIBLE ROLE OF ELECTRO- ACOUSTIC AND CAVITATION EFFECTS [O] . Keswani Manish, Manish Keswani, Copyright Manish Keswani 2016

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8. Development of Megasonic Cleaning for Silicon Wafers [R] . Mayer, A. 1980

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Role of Carbonates in Scavenging Hydroxyl Radicals Generated During Megasonic Irradiation of Wafer Cleaning Solutions (PPT)

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