Design on Ultrahigh Vacuum System with Titanium Pump

摘要

In order to meet the further requirements that study diamond-like carbon (DLC) films as rigid protective coating, a three-stage ultrahigh vacuum system composed of rotary vane pump and diffusion pump in parallel with TSP (titanium sublimation pump) was designed mainly for getting limiting vacuum of 1.0×10~(-6) Pa within 30 minutes in the vacuum chamber of about 0.23 m~3. The chamber is a horizontal cylinder supported by a saddle-shaped bracket and it has been proved to satisfy the requirements of strength and stiffness, it can be easy to get ultrahigh vacuum by TSP. Initiation pressure of the TSP was set to 10~(-3) Pa vacuum after optimization analysis and the diffusion pump simultaneously was closed for the proper use. The system can be used as deposition equipment with the assistance of high and low vacuum measuring instruments and other accessories.