Low Power Consumption Micro C_2H_6OH Gas Sensor based on Micro-heater and Screen Printing Technique

摘要

Micro C_2H_5OH gas sensor was fabricated based on micro-heater using tin oxide nano-powder with low power consumption and high sensitivity. Semiconducting SnO_2 nano-powders were synthesized via co-precipitation method, and to increase the sensitivity for alcohol gas rare metal dopants were added. In the structure of micro-heater, the resistances of two semi-circled Pt heaters are connected to the spreader for thermal uniformity. Based on the above design, low power consumption alcohol gas sensor was fabricated by using CMOS compatioble MEMS process. Bridge type micro-heater based on Si substrate was fabricated by surface micromachining technique. Micro gas sensor showed substantial sensitivity down to 0.5 ppn alcohol at low power consumption (35 mW).