机译:基于微加热器和丝网印刷技术的低功耗微型C_2H_5OH气体传感器
ETRI, 138 Gajeong-ro, Yuseong-gu, Dejeon 305-700, South Korea, 305-700, Convergence Components & Materials Research Laboratory, Electronics and Telecommunications Research Institute, 131, Gajeong-Dong, Yuseung-Gu, Daejeon, South Korea;
ETRI, 138 Gajeong-ro, Yuseong-gu, Dejeon 305-700, South Korea;
ETRI, 138 Gajeong-ro, Yuseong-gu, Dejeon 305-700, South Korea;
ETRI, 138 Gajeong-ro, Yuseong-gu, Dejeon 305-700, South Korea;
ETRI, 138 Gajeong-ro, Yuseong-gu, Dejeon 305-700, South Korea;
ETRI, 138 Gajeong-ro, Yuseong-gu, Dejeon 305-700, South Korea;
ETRI, 138 Gajeong-ro, Yuseong-gu, Dejeon 305-700, South Korea;
Sentech Korea, Sinchon-dong 21-6, Jimokro 75-gil, Paju-Si, Gyeonggi-Do 413-170, South Korea;
Sentech Korea, Sinchon-dong 21-6, Jimokro 75-gil, Paju-Si, Gyeonggi-Do 413-170, South Korea;
Gas sensor; SnO_2; Micro-heater; Surface micromachining; Alcohol;
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机译:P1.0.22基于微加热器和丝网印刷技术的低功耗微型C2H5OH气体传感器