In this work the effects of proton irradiation and mechanical stress on the off-state current of MuGFET devices are analyzed for different temperatures. Two different splits are evaluated: an unstrained and biaxial+uniaxial strained one. The off-state current grows with the stress effectiveness due to the GIDL increase and this off-current is even worse when these devices are submitted to proton irradiation due to the increase of the conduction through the back interface. The off-state current of irradiated strained devices reaches unacceptable values, in the range of 26μA at a temperature of 100°C. The temperature has a strong influence on the off-state current since it impacts on both GIDL and back interface conduction.
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