Ultrasonic Vibration and Cavitation-aided Micromachining of Hard and Brittle Materials

摘要

This paper deals with the use of two types of ultrasonic-assisted micromachining methods for obtaining longer tool life and higher machining efficiency in the micromachining of hard and brittle materials. USV drilling is drilling that is aided by ultrasonic vibration in the direction axial to the tool. Cavitation machining is a method is aided by ultrasonic vibration of the cutting fluid. We investigated the effects of USV, cavitation, and their combination on the micro drilling of SiC. Experimental results clearly showed an improvement in tool life and a reduction in tool wear. Furthermore, the accuracy was improved.