A MEMS Air Driven Fluidic Resonance Generator Based on Pohlman Acoustic-generator

摘要

A novel micro air driven fluidic resonance generator based on Pohlman acoustic-generator, PZT jet generator principles and MEMS process technology is proposed. It provides power for the fuze circuit by the effects of acoustic mechanical vibration and Piezoelectric effect. The FSI and piezoelectric simulation results show that the new MEMS piezoelectric jet generator based on Pohlman acoustic-generator has a simple structure, small size and high energy density, and it can meet the low cost requirement of fuze circuits.