Response of Sensitive Device of Piozoresistive Accelerometer to Load

摘要

The sensitive characteristics of sensitive device which was closely related to the mechanical properties of its micro elastic cantilever play a role in analysing the performance of piezoresistive accelerometer. To make a research on the response of the system to load, the deformation model of micro elastic cantilever of sensitive device belongs to piezoresistive accelerometer was built based on the method of system identification in this article to analyze their mechanical properties under static external load, the deformation equation was deduced and the quasi-dynamic deformation model of micro cantilever was obtained according to the principle that displacement was directly proportional to load. The conclusion could be used for evaluating the dynamic behavior of structure on virtual operation which would provide reference for optimization design of micro structures.