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Challenges in Designing Low-Cost Media-Isolated MEMS Pressure Transducers for HVAC/R Applications

机译:设计低成本媒体隔离的MEMS压力传感器的挑战用于HVAC / R应用

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Introduction of DURAsense, an innovative MEMS packaging technology which eliminates the need for the traditional method of metal diaphragm welding and oil-fill to achieve media-compatibility and... ...can achieve an accuracy equal to or better than any other HVAC transducer currently on the market ...is compatible with refrigerant fluids ...has a wide temperature range ...has a high reliability ...that meets the cost target for HVAC/R.
机译:杜拉斯语的引入,一种创新的MEMS包装技术,消除了对传统金属隔膜焊接和油填充方法的需求,实现媒体兼容性和......可以达到比任何其他HVAC换能器更好或更好的精度目前在市场上......与制冷剂流体相容...具有宽的温度范围......具有高可靠性......满足HVAC / R的成本目标。

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