The Design of Three-dimensional Vibration Sensor Based On SOI Microfabbrication

摘要

Compared with the traditional vibration sensors, the micro-vibration sensor have many advantages, such as small size, high sensitivity and low noise which is based on micro-fabbrication. This paper introduced the micro-vibration sensors which sensitive structure are cilium and micro-elastic beams. The micro-vibration sensors were produced by the inductively coupled plasma technology (ICP), the maximal etching depth of which can be greater than 300μm, the thickness of beam is less than 20μm and the longth of cilium are more than 3000μm. The sensitivity of the sensor is 102.5μV/g, the measurement range to ±20g, and the resonant frequency is 2KHz.