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Application of fiber Bragg grating sensors for the micro-strain measurement of optical components surface

机译:光纤布拉格光栅传感器在光学元件表面微应变测量中的应用

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Fiber Bragg Grating Sensors (FBGS) are gaining increasing attention in the fields of micro-stress analysis, showing high accuracy and sensitivity. In this paper, FBGS which wavelength variations can be converted to strains, are used to measure the microstrain variation of a plane mirror where the forces acting upon. Both the self-gravity and extrusion forces are applied to the surface of the optical elements, generating inevitable deformation and decreasing the test accuracy of the whole optical system. First, a micro-strain model is built using finite element analysis to obtain the qualitative value of the micro-strain variation. Next, a series experiments are performed to validate the model is effective. A detailed analysis of the micro-strain variation is acquired from the phase generated carrier homodyne demodulation and then the three-step phase-shifting algorithm based on an unbalanced MachZehnder interferometer system. The experimental results match well with the theory. Both the modeling and measurement results indicate that the sensitivity of this method in measuring the micro-strain can be reached as small as.
机译:光纤布拉格光栅传感器(FBGS)在微应力分析领域中越来越高,呈现高精度和灵敏度。在本文中,可以将波长变化转换为应变的FBG来测量动力作用的平面镜的微陶器变化。自重和挤出力均施加到光学元件的表面,产生不可避免的变形并降低整个光学系统的测试精度。首先,使用有限元分析建立微应变模型,以获得微应变变化的定性值。接下来,进行系列实验以验证模型是有效的。从相位生成的载波杂差解调获取微应变变化的详细分析,然后基于不平衡Machzehnder干涉仪系统的三步相移算法。实验结果与理论相匹配。建模和测量结果均表明该方法在测量微应变时的灵敏度可以达到小于。

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