Fabrication and Optical Testing of SU-8 Based MEMS Accelerometer

摘要

In this paper we report the fabrication and optical testing of SU-8 based MEMS accelerometer. The Fabricated accelerometer by photolithography technique consists of a rectangular proof mass which is suspended on bases using four L shape beams. The sensor sensitivity and resolution are 137 μm/g and 36 mg, respectively.