Free-space micro-machined microoptical bench for assembling of hybrid MOEMS

摘要

We propose a technology platform for the integration of hybrid MOEMS on a reconfigurable free-space microoptical bench. Microoptical bench includes a micro-machined submount, movable carriers and holders to permit the building of dynamically-aligned, reconfigurable optical microsystems. Manipulation and final assembly of MOEMS components is obtained by the approach of micro-assembly workcell.