Electrical Properties and Surface Morphology Study of Titanium Dioxide Thin Films Prepared by Sol Gel Method

摘要

Electrical properties and surface morphology study are investigated for titanium dioxide thin films prepared using sol gel method. Titanium dioxide thin films were deposited on glass and silicon substrates by spin coating technique. The result indicated electrical properties of titanium dioxide thin films were changed with different substrates, annealing temperatures, and glacial acid concentrations. The SEM investigation showed that grain size of titanium oxide increased with higher volume of glacial acetic acid and higher annealing temperature up to 450°C. The results suggest that electrical properties and surface morphology of titanium dioxide could be tailored by using different substrates, modifying glacial acid volume and changing annealing temperatures for electronic devices application.