THE EFFECTS OF INCREASING AlN MOLE FRACTION ON THE PERFORMANCE OF AlGaN ACTIVE REGIONS CONTAINING NANOMETER SCALE COMPOSITIONALLY INHOMOGENEITIES

摘要

In this paper we report on the characterization of n-Al0.51Ga 0.49N active regions and the fabrication of ultraviolet LEDs that contain self-assembled, nanometer-scale compositional inhomogeneities (NCI-AlGaN) with emission at ~290 nm. These active regions exhibit reduced integrated photoluminescence intensity and PL lifetime relative to 320 nm NCI-AlGaN active regions that have significantly lower AlN mole fraction, despite having more than an order of magnitude fewer threading dislocations, as measured by transmission electron microscopy. This behavior is attributed to nonradiative recombination associated with the presence of a larger density of point defects in the higher Al content samples. The point defects are ameliorated somewhat by the lower density of NCI AlGaN regions in the higher Al content samples, which leads to a larger concentration of carriers in the NCI and concomitant reduced radiative lifetime that may account for the high observed peak IQE (~ 25%). Prototype flip chip double heterostructure-NCI-ultraviolet light emitting diodes operating at 292 nm have been fabricated that employ a 50% NCI-AlGaN active region.