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A NON-CONTACT SURFACE MEASUREMENT SYSTEM FOR COMPLEX OPTICAL GEOMETRIES

机译:用于复杂光学几何形状的非接触面测量系统

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Current techniques for the surface figure metrology of complex shapes are limited. OptiPro Systems is developing a non-contact measurement system called UltraSurf. The goal is to characterize concave and convex surfaces of aspheric and freeform shapes up to 200 millimeters (mm) in diameter with precision and without the limitations associated with other measurement methods Measuring is done by using state of the art motion control components and a non-contact probe. In this work, we review the recent development of the UltraSurf system and the methods of surface measurement. In addition, future work and experimentations are discussed.
机译:复杂形状的表面图测量的电流技术有限。 OptiPro系统正在开发一种名为Ultrasurf的非接触式测量系统。目标是在直径上表征非球面和自由形状的凹凸和凸面,直径为200毫米(mm),具有精确度,并且没有与其他测量方法相关的限制,通过使用现有的动作控制部件和非联系探头。在这项工作中,我们审查了最近的超声波系统的发展和表面测量方法。此外,还讨论了未来的工作和实验。

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