Effects of the Plasma Dynamics on the EUV Emission from a Laser Assisted Discharge Produced Sn Plasma EUV source - (PPT)

摘要

The relations between in-band EUV emission and the behaviors of the imploding plasma in the laser assisted discharge produced Sn plasma EUV source has been experimentally investigated. Time resolved 2-dimensional electron density distribution map of the EUV-emitting Z-pinch plasma was obtained. Electron density of the Z-pinch plasma is within the optimum condition for 13.5 nm EUV generation. Intense EUV emission is generally related to the sausage (m=0) instability. The shock wave from the anode plasma can also generate relatively weak EUV emission.