Modeling and Experimental Analysis of Piezoelectric Shakers for High-Frequency Calibration of Accelerometers

摘要

Piezoelectric shakers have been developed and used at the National Institute of Standards and Technology (NIST) for decades for high-frequency calibration of accelerometers. Recently, NIST researchers built new piezoelectric shakers in the hopes of reducing the uncertainties in the calibrations of accelerometers while extending the calibration frequency range beyond 20 kHz. The ability to build and measure piezoelectric shakers invites modeling of these systems in order to improve their design for increased performance, which includes a sinusoidal motion with lower distortion, lower cross-axial motion, and an increased frequency range. In this paper, we present a model of piezoelectric shakers and match it to experimental data. The equations of motion for all masses are solved along with the coupled state equations for the piezoelectric actuator. Finally, additional electrical elements like inductors, capacitors, and resistors are added to the piezoelectric actuator for matching of experimental and theoretical frequency responses.