Uncertainty estimation of an auto-compensated laser interferometer systems calibration

摘要

The purpose of this article is to overview the art's state of laser interferometer systems calibration, including a theoretical background measurement of length, as a power technique widely used in industry for direct precision measurement of length and displacement. Such essential periodic laser interferometer calibration confirms the traceability measurement chain to the absolute standard for the metre. The measurement method and modelequation, which serves as the basis for the uncertainty evaluation, is described. The uncertainty evaluation is performed in accordance with the document JCGM 100:2008-Evaluation of measurement data - Guide to the expression of uncertainty in measurement (GUM).