Advanced dielectric charging characterization and modeling in Capacitive MEMS

摘要

The present work provides a comprehensive view on the available assessment tools to monitor the dielectric charging in MEMS capacitive actuators. A detailed comparison of the up to now employed methods is presented pointing out, according to present knowledge, the strength and weakness of each one. The goal is to obtain a better understanding of the exploitable information drawn from experimental results in an attempt to extract appropriate information on its contribution towards the increase of knowledge on the dielectric charging. Emphasis is given on the comparison of results regarding the effect of electric field intensity, temperature, time window of observation and ambient.