Simulation-based Method to Design Conveyors in Semiconductor Wafer Fabs - (PPT)

摘要

Research has shown that Small Lot Manufacturing (SLM) will cause AMHS vehicles to be a cycle-time detractor Foresees a high-speed, low variability AMHS that can cost-effectively support small-lot manufacturing such as conveyors Dependence on centralized storage and related distance delays results in underutilized tools (ISMI 2009).