Laser Center Finder As An Early Indicator of Robot Condition and Bearing Performance - (PPT)

摘要

CF/OTF As SPC: Its SPC data can be used to monitor robot performance in real time. Extension Of Work: These results are applicable to tool with LCF/OTF capability. This approach can reduce or eliminate the need to use electronic monitor wafers as a way to remotely monitor robot performance. Real-time feedback is useful to monitor, implement robot improvements and plan maintenance.