MEASUREMENT OF A RESIDUAL IMPRESSION BY THE LASER SCANNING MICROSCOPE WITH DIC UNIT

摘要

When the nanoindentation testing is carried out, it is very important to understand the residual impression and the surface around it. Generally Atomic Force Microscopy (AFM) is used to obtain them. However, it is necessary to understand correct shape in the point of cantilever in AFM procedure. And, measuring them by AFM procedure precisely, very long measurement time and very clean environment and so on are needed. So, there are many difficulties to use AFM procedure for measuring residual impression and the surface around it. On the other hand, there are some procedures to measure them. Scanning Electro Microscopy (SEM) is effective to the grasp of the shape of the surface and the ruggedness. But, this procedure needs the coating of the sample and the vacuum atmosphere. Therefore it is not a simple and quick procedure. In this paper, authors used the laser scanning microscope with a differential interference contrast unit to obtain the data of a residual impression and the surface around it. This procedure is the very simple and quick procedure in no contact and measuring in various environmental conditions. The data of indentation depth from this procedure is obtained at the nano-meter order. The results from this procedure compare with the results from displacement of nanoindentation test.