Vacuum Ultra Violet (VUV) emission from a 4 cm diameter 2 cm long compact ion source excited by 14 GHz microwave has been investigated. Intensity ratio of band spectrum emission near Ly-α to Ly-α line spectrum is determined from the measured spectrum. which shows preferential excitation of molecules near the entrance of microwave input power. The ratio does not depend strongly upon pressure nor the input microwave power when the intensity is integrated over the volume of the plasma. The spatial distribution of the spectrum intensity ratio exhibits concentrations near microwave inlet and the opposite side where the microwave matching structure is located. The ratio at these peripheral regions is about two times as high as that of the central region. The ratio increased in proportion to the ion source pressure up to about 3.0 Pa, indicating efficient production of high energy electrons by ECR up to this pressure.
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