Investigation of impurity composition of atomic hydrogen beam formed by a low-pressure arc-discharge source

摘要

Results of impurity composition investigation of large-area atomic hydrogen beam formed by a low-pressure arc discharge source with self-heated cathode were cited. The study was performed on 18 metallic elements. Method, based on measurement of sheet concentration of metal atoms on Si sample surface before and after exposition in atomic hydrogen flow was used for determination of composition of impurities in atomic hydrogen beam. Measurement of sheet concentration of metal atoms was realized by ToF SIMS method. The method sensitivity was 10~8 at. cm~(-2). Principal reason of parasitic metal particles occurrence in the beam and the methods for reduction of metal impurity concentration in AH beam was investigated.