Dangerous Gases Within Hermetically Sealed Enclosures

摘要

Sealed enclosures housing various electronic, electrooptical, and micromechanical devices surround the devices with a unique gaseous environment. Assuring reliable device operation requires filling the enclosures with inert gases, or in some cases a vacuum. Several "contaminant" gases inside enclosures can compromise device function. This paper summarizes these contaminants and the threats they pose to reliable device operation.