A Review of Developments in the Preparation Methods of Tantalum Pentoxide Film

摘要

Tantalum pentoxide film has a huge application potential in microelectronic field owing to its good chemical stability and thermal stability, and its good compatibility with semiconductor integrated circuit. In addition, Tantalum pentoxide film also has a high dielectric constant, a high refractive index, low absorption rate and a wide spectral range from 300nm to 1000nm in the visible spectral region. At present, it has a wide application in antireflection coatings, lasers, optical communication, solar wafers and so on. This review will focus on the preparation methods of Tantalum pentoxide film, and tantalum pentoxide film's property and application, which are better for us to choose an appropriate method in an appropriate occasion.