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Drain induced barrier lowering and impact ionization effects in short channel polysilicon TFTs

机译:漏极引起的屏障降低和碰撞电离效应在短通道多晶硅TFT中

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摘要

The effect of channel length reduction on the electrical characteristics of self-aligned polysilicon TFTs has been investigated by combining experimental characteristics and 2-D numerical simulations. The role of drain induced barrier lowering and floating body effects has been carefully analized using numerical simulations.
机译:通过组合实验特征和二维数值模拟,研究了通道长度降低对自对准多晶硅TFT的电特性的影响。使用数值模拟已经仔细分析了漏极感应屏障降低和浮体效应的作用。

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