BCDRouter: global routing considering CMP and via reduction

摘要

Chemical-mechanical polishing (CMP) is one of the fundamental problems that should be considered for improving design for manufacturability (DFM) in routing. This paper presents a global routing algorithm, which is BCDRouter, to consider CMP. The algorithm uses the routing density of GRC to simulate the density of CMP, and reduces routing and congestion densities simultaneously. This will make the continuous CMP plainer. So that DFM, reliability and yield can be improved. The experimental results show that the algorithm is effective in reducing maximum GRC congestion and congestion variance.