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Measurement of Aluminium Oxide-Film Thickness: Barrier Oxide Film and Oxide Porous Layer

机译:氧化铝膜厚度的测量:阻挡氧化物膜和氧化物多孔层

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In the present investigation, holographic interferometry was utilized for the first time to measure in situ the thickness of the oxide film, alternating current (A.C.) impedance, and double layer capacitance of aluminium samples during anodization processes in aqueous solution without any physical contact. The anodization process (oxidation) of the aluminium samples was carried out by the electrochemical impedance spectroscopy (EIS), in different concentrations of sulphuric acid (0.5-2.5 % H_2SO_4) at room temperature. In the mean time, the real-time holographic interferometric was used to measure the thickness of anodized (oxide) film of the aluminium samples in aqueous solutions. Also, mathematical models were applied to measure the alternating current (A.C.) impedance, and double layer capacitance of aluminium samples by holographic interferometry, during anodization processes in aqueous solution. Consequently, holographic interferometric is found very useful for surface finish industries especially for monitoring the early stage of anodization processes of metals, in which the thickness of the anodized film, the A.C. impedance, and the double layer capacitance of the aluminium samples in sulphuric acid (0.5-2.5 % H_2SO_4) can be determined in situ. Futhermore, a comparison was made between the electrochemical values obtained from the holographic interferometry measurements and from measurements of electrochemical impedance spectroscopy(EIS) on aluminium samples in sulphuric acid (0.5-2.5 % H_2SO_4). The comparison indicates that there is good agreement between the obtained electrochemical data from both techniques. However, there is a drastic difference between the measurement of the oxide film thickness by both techniques. The oxide film thickness of the aluminium samples in 0, 0.5, 1.0, 1.5, 2.0, 2.5% H_2SO_4 by the optical interferometry is in a micrometer scale. However, the oxide film thickness of the aluminium samples in 0, 0.5, 1.0, 1.5, 2.0, 2.5% H_2SO_4 by the E.I.Spectroscopy in a nanometer scale. This can be explained due to the fact that the E.I.Spectroscopy is useful technique to measure the electrochemical parameters and the thickness of the barrier (compact) oxide films. In contrast, the optical interferometry is found useful technique to characterize and measure the thickness of the porous oxide layer. Also, the optimum thickness of the oxide barrier film was detected to be equivalent to 0.612nm in sulphuric acid concentration of 2.5% H_2SO_4 by E.I. spectroscopy.
机译:在本研究中,全息干涉测量首次使用氧化膜,交流(A.C.)阻抗和铝样品的厚度的厚度测量在水溶液中的阳极氧化过程中而没有任何物理接触。铝样品的阳极氧化过程(氧化)通过电化学阻抗光谱(EIS),在室温下以不同浓度的硫酸(0.5-2.5%H_2SO_4)进行。在平均的时间内,使用实时全息干涉测量来测量水溶液中铝样品的阳极氧化(氧化物)膜的厚度。此外,应用数学模型来测量水溶液中的阳极氧化过程期间通过全息干涉测量通过全息干涉测量铝样品的交流(A.C.)阻抗和双层电容。因此,全息干涉测量对于表面光洁度行业非常有用,特别是用于监测金属阳极氧化过程的早期阶段,其中阳极氧化膜的厚度,AC阻抗和硫酸中的铝样品的双层电容( 0.5-2.5%H_2SO_4)可以原位确定。 Futhermore,在从全息干涉测量测量测量中获得的电化学值和硫酸中的铝样品上的电化学阻抗光谱(EIS)测量之间进行了比较(0.5-2.5%H_2SO_4)。比较表明,来自两种技术的获得的电化学数据之间存在良好的一致性。然而,通过两种技术测量氧化膜厚度之间存在剧烈差异。通过光学干涉测量法在0,0.5,1.0,1.5,2.0,2.5%H_2SO_4中的氧化膜厚度为2.5%H_2SO_4。然而,铝样品的氧化膜厚度为0,0.5,1.0,1.5,2.0,2.5%H_2SO_4,通过E.I.Spectroscopy以纳米级。这可以解释,因为e.i.pectroscopy是测量电化学参数的有用技术和屏障(紧凑)氧化膜的厚度的有用技术。相反,发现光学干涉法有用的技术表征和测量多孔氧化物层的厚度。而且,检测氧化物阻隔膜的最佳厚度,相当于E.i的硫酸浓度为0.612nm。光谱学。

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