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首页> 外文期刊>Diffusion and Defect Data. Solid State Data, Part A. Defect and Diffusion Forum >Measurement of Aluminium Oxide-Film Thickness: Barrier Oxide Filmand Oxide Porous Layer
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Measurement of Aluminium Oxide-Film Thickness: Barrier Oxide Filmand Oxide Porous Layer

机译:氧化铝膜厚度的测量:氧化阻挡膜和氧化多孔层

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In the present investigation, holographic interferometry was utilized for the first time to measure in situ the thickness of the oxide film, alternating current (A.C.) impedance, and double layer capacitance of aluminium samples during anodization processes in aqueous solution without any physical contact. The anodization process (oxidation) of the aluminium samples was carried out by the electrochemical impedance spectroscopy (EIS), in different concentrations of sulphuric acid (0.5-2.5 % H_2SO_4) at room temperature. In the mean time, the real-time holographic interferometric was used to measure the thickness of anodized (oxide) film of the aluminium samples in aqueous solutions. Also, mathematical models were applied to measure the alternating current (A.C.) impedance, and double layer capacitance of aluminium samples by holographic interferometry, during anodization processes in aqueous solution. Consequently, holographic interferometric is found very useful for surface finish industries especially for monitoring the early stage of anodization processes of metals, in which the thickness of the anodized film, the A.C. impedance, and the double layer capacitance of the aluminium samples in sulphuric acid (0.5-2.5 % H_2SO_4) can be determined in situ. Futhermore, a comparison was made between the electrochemical values obtained from the holographic interferometry measurements and from measurements of electrochemical impedance spectroscopy(EIS) on aluminium samples in sulphuric acid (0.5-2.5 % H_2SO_4). The comparison indicates that there is good agreement between the obtained electrochemical data from both techniques. However, there is a drastic difference between the measurement of the oxide film thickness by both techniques. The oxide film thickness of the aluminium samples in 0, 0.5, 1.0, 1.5, 2.0, 2.5% H_2SO_4 by the optical interferometry is in a micrometer scale. However, the oxide film thickness of the aluminium samples in 0, 0.5, 1.0, 1.5, 2.0, 2.5% H_2SO_4 by the E.I.Spectroscopy in a nanometer scale. This can be explained due to the fact that the E.I.Spectroscopy is useful technique to measure the electrochemical parameters and the thickness of the barrier (compact) oxide films. In contrast, the optical interferometry is found useful technique to characterize and measure the thickness of the porous oxide layer. Also, the optimum thickness of the oxide barrier film was detected to be equivalent to 0.612nm in sulphuric acid concentration of 2.5% H_2SO_4 by E.I. spectroscopy.
机译:在本研究中,全息干涉法是首次用于在水溶液中阳极氧化过程中原位测量氧化膜的厚度,交流电(A.C.)阻抗和铝样品的双层电容,而无需任何物理接触。在室温下,在不同浓度的硫酸(0.5-2.5%H_2SO_4)中,通过电化学阻抗谱(EIS)对铝样品进行阳极氧化处理(氧化)。同时,实时全息干涉仪用于测量水溶液中铝样品的阳极氧化膜厚度。此外,在水溶液中的阳极氧化过程中,应用数学模型通过全息干涉法测量铝样品的交流阻抗和双层电容。因此,全息干涉仪对于表面处理行业非常有用,特别是对于监测金属的阳极氧化过程的早期阶段,其中阳极氧化膜的厚度,交流阻抗和硫酸中铝样品的双层电容( 0.5-2.5%H_2SO_4)可以原位测定。此外,比较了从全息干涉测量获得的电化学值和在硫酸(0.5-2.5%H_2SO_4)中铝样品上的电化学阻抗谱(EIS)的测量结果。比较表明,从两种技术获得的电化学数据之间有很好的一致性。然而,通过两种技术在氧化膜厚度的测量之间存在巨大差异。通过光学干涉法测得的0、0.5、1.0、1.5、2.0、2.5%H_2SO_4中的铝样品的氧化膜厚度为微米级。然而,通过E.I.光谱法,以纳米级计,铝样品的氧化膜厚度为0、0.5、1.0、1.5、2.0、2.5%H_2SO_4。可以解释这一点的原因在于,电子能谱法是用于测量电化学参数和势垒(紧凑)氧化膜厚度的有用技术。相反,发现光学干涉法是表征和测量多孔氧化物层的厚度的有用技术。另外,通过E.I.检测出,在2.5%的H_2SO_4的硫酸浓度下,氧化物阻挡膜的最佳厚度为0.612nm。光谱学。

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