Monolithic Integration of a Tunable Photodetector Based on InP/air-gap Fabry-Perot Filters

机译：基于INP / Air-Gabry-Perot滤光片的可调谐光电探测器的单片集成

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We present a tunable photodetector MEMS device consisting of an InP/air-gap Fabry-Perot filter combined with a pin-photodiode structure. Epitaxial growth and advanced surface micromachining are used for the monolithic integration of both devices. Special process steps regarding detector geometry, photo current and signal quality have been investigated to assure high performance.

机译：我们提出了一种可调谐的光电探测器MEMS器件，其由与销光电二极管结构组合的INP / Air-Gabry-Perot滤波器组成。外延生长和先进的表面微机器用于两种器件的单片集成。已经研究了关于检测器几何，光电流和信号质量的特殊工艺步骤以确保高性能。

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《IEEE/LEOS International Conference on Optical MEMS and Nanophotonics》|2008年||共2页
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Thomas Kusserow; Ricardo Zamora; Julian Sonksen; Nethaji Dharmarasu; Hartmut Hillmer; Tetsuji Nakamura; Tetsuo Hayakawa; Balasubramanian Vengatesan;
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中图分类 TN29-53;
关键词
InP; GaInAs; Photodetector; Pin photodiode; Near infrared; Air-gap DBR; Tunable filters;

机译：inp;gainas;photodetector;销光电二极管;近红外;气隙DBR;可调滤波器;

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专利

1. Highly selective and widely tunable 1.55-/spl mu/m InP/air-gap micromachined Fabry-Perot filter for optical communications [J] . Spisser A., Ledantec R. IEEE Photonics Technology Letters . 1998,第9期

机译：高度选择性和广泛可调的1.55- / splμm/ m InP /气隙微加工Fabry-Perot滤波器，用于光通信
2. Optomechanical design of tunable InP-based Fabry-Perot filters for wavelength division multiplexing applications [J] . Mithilesh Ashok Shah, Vicknesh Shanmugan, Golam Kibria Chowdhury, Journal of Microlithography, Microfabrication, and Microsystems. (JM3) . 2005,第4期

机译：适用于波分复用应用的基于InP的可调法布里-珀罗滤波器的光机械设计
3. 1.57-μm InP-BASED RESONANT-CAVITY-ENHANCED PHOTODETECTOR WITH InP/AIR-GAP BRAGG REFLECTORS [J] . Xiaomin Ren, Hui Huang, Yingzhe Chong, Microwave and optical technology letters . 2004,第2期

机译：具有InP /气隙布拉格反射器的1.57μm基于InP的共振腔增强光电探测器
4. Monolithic Integration of a Tunable Photodetector Based on InP/air-gap Fabry-Perot Filters [C] . Thomas Kusserow, Ricardo Zamora, Julian Sonksen, IEEE/LEOS International Conference on Optical MEMS and Nanophotonics . 2008

机译：基于INP / Air-Gabry-Perot滤光片的可调谐光电探测器的单片集成
5. Design, Simulation, Fabrication, and Characterization of MEMS-based, Tunable FABRY-PEROT Interferometer Filter in the Long Wavelength Infrared Region [D] . Kim, Tae Sung . 2019

机译：在长波长红外区域中基于MEMS的可调谐法布里 - 珀罗干涉仪滤波器的设计，仿真，制造和表征
6. Photodetector based on Vernier-Enhanced Fabry-Perot Interferometers with a Photo-Thermal Coating [O] . George Y. Chen, Xuan Wu, Xiaokong Liu, -1

机译：基于具有光热涂层的游标增强法布里-珀罗干涉仪的光电探测器
7. InP-Based Photodetectors Monolithically Integrated with 90° Hybrid toward Over 400Gb/s Coherent Transmission Systems [O] . Hideki YAGI, Takuya OKIMOTO, Naoko INOUE, 2019

机译：基于INP的光电探测器用90 °掺入超过400gb / s的相干传动系统的杂种
8. Temperature Tunable Air-Gap Etalon Filter [R] . Krainak, Michael A., Stephen, Mark A., Lunt, David L. 1998

机译：温度可调气隙标准具滤波器

Monolithic Integration of a Tunable Photodetector Based on InP/air-gap Fabry-Perot Filters

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