Automated optical inspection method for MEMS fabrication

摘要

This paper presents a new optic inspection method for detection of defects in the layer of Micro Electro Mechanical Systems (MEMS) after the bonding process. In testing MEMS, a piezo driven vibrator is used to vibrate the MEMS device at its natural resonance frequency in vacuum environment. The amplitude of the vibrated movement of the device is visually recorded and frame of the video is processed by the developed image processing algorithm. When excited by resonant frequency generator, the variance of deflection of the tested device can be the indicator of defectiveness of the MEMS.