RESEARCH INTO CERAMIC INJECTION MOLDING of PZT for new 3D SHAPES on PROTOTYPING and MASS PRODUCTION in MICROSYSTEMS

摘要

Piezoelectric actuators elements have been produced by ceramic injection molding and. The goal was to manufacture 3D shapes that fit into a test system for a frictional connection with less finishing. The big advantages of this process technique are more freedom in design lead-zirconate-titanate (PZT) actuators/sensors and the possibility for low cost mass production. To achieve these goals, many researches into material behaviour, especially shrinking caused by debinding and sintering of the feedstock, have been done. These technical expertises were used for the final design of the injection molding tool. Another focus was put on deriving the piezoelectric properties of the final product. Because of using a mixed compound piezoelectric ceramic powder with addition of a thermoplastic binder system as injection molding aid, the properties of the finally polarized PZT are equivalent to other processing technologies like dry pressing, thick film etc. The molding principle is used to form micro-structures (e.g. beams, diaphragms) on the 3D shape surface. Therefore the main focus is on deriving precision and optimisation for low cost mass production.