A Novel 3-in-l MEMS Variable Capacitance Device with a Customizable Tuning Range

摘要

This paper presents a new category of MEMS variable capacitance devices which can provide a specific tuning range tailored to the specific application being considered. Depending on the tuning range chosen, this device can play the role of a variable capacitor, a switched capacitor, or a switch. The proposed structure can provide theoretical tuning ranges anywhere from 4.9 to 35 with a simple, yet effective, layout modification as opposed to previously reported devices where the tuning range is fixed and cannot be varied. Three variations of the variable capacitance device were fabricated as proof-of-concept prototypes in the PolyMUMPS process to verify the theoretical analysis, and measurement results showed tuning ranges of 3, 3.4, and 4.4 respectively, confirming our theoretical analysis.