Metal resistor bolometer on GaAs substrate

摘要

A metal resistor bolometer for the detection of x-ray emission from laser plasma has been designed and fabricated. The bolometer is placed on a thin polymeric foil with the use of thin film technology. The foil is suspended on a GaAs substrate. The Au/Pt/Ti thin film resistor of 2000 Ω resistance and 0.19 %/K temperature coefficient is used for sensing temperature. A detection head equipped with the bolometer and accompanying read-out electronics has been fabricated and used in a plasma experiment.