The semiconductor industry is a highly interesting field for electrical drives by the rising demands in the last decade. Nano-meter accuracy was already proven for stages 20 years ago, but nowadays this is requested also for semiconductor equipment with accelerations of more than 10m/s{sup}2 during 40% of the time. The dynamics of the mechanics has to be solved first, including vibration isolation. Subsequently follows the actuators with as main items their control behaviour, heating and mass. Vacuum compatibility is added recently. So, clear challenges for electrical drives.
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机译：半导体行业是过去十年的需求上升的电力驱动器的高度有趣领域。纳米米的精度已经证明了20年前的阶段，但如今，在40％的时间内，也可以为10m / s {sup} 2的加速度提供超过10m / s {sup} 2的半导体设备。必须先解决机械的动态，包括振动隔离。随后随着其控制行为，加热和质量的主要物品跟随执行器。最近添加了真空兼容性。因此，清除电动驱动器的挑战。
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