A novel planar piezoelectric actuator with nano-positioning ability operating in bending-bending hybrid modes

摘要

A planar piezoelectric actuator using bending-bending hybrid modes is proposed. The actuator is composed four uniform transducers that can bend in the horizontal and vertical directions dependently. The actuator can operate in two modes: dynamic mode and quasi-static mode. The dynamic mode uses the hybrid bending resonance modes to achieve a large travelling range with high speed; the quasi-static mode uses the quasi-static horizontal bending to achieve a micrometre travelling range with nanometer resolution. The operating principle is discussed and simulated by finite element method (FEM). Maximum linear and rotary speeds of 19.8 mm/s and 0.266 rad/s are obtained under a voltage of 400 Vp-p and frequency of 11.86 kHz in the dynamic mode. When operating in quasi-static mode, there is a linear relationship between the output displacement and voltage, linear and rotary displacement resolutions of 16 nm and 0.198 mu rad are obtained. The actuator can accomplish large travelling range with nano-positioning ability.