Stepping piezoelectric actuators with large working stroke for nano-positioning systems: A review

摘要

Precision positioning systems with large working stroke (millimeter or more) and micro/nano-scale positioning resolution are widely required in both scientific research and industries. For this kind of applications, piezoelectric materials based actuators show unique advantages and have been widely employed. To overcome the demerit of the limited working stroke for single piezoelectric element, various stepping motion principles have been proposed in the past years, and accordingly, stepping piezoelectric actuators with various structures have been designed and evaluated. This review is aimed to summarize the recent developments and achievements in stepping piezoelectric actuators with large working stroke. Especially, the emphasis is on three main types of stepping piezoelectric actuators, i.e., inchworm type, friction-inertia type, and parasitic type. The motion principles of these three types of piezoelectric actuators and the corresponding developments of various actuators are discussed respectively, followed by pointing out the existing problems in these three types of piezoelectric actuators and proposing some potential research directions in this topic. It is expected that this review is helpful for relevant researchers to understand stepping motion principles as well as piezoelectric actuators, and to successfully select and design stepping piezoelectric actuators for specific applications. (C) 2019 Elsevier B.V. All rights reserved.