STUDY ON ACTIVE VIBRATION ISOLATION SYSTEM FOR THE BED OF ULTRA-PRECISION TURNING MACHINE

摘要

The aim of this thesis about active isolation vibration system for the bed of ultra-precision turning machine is to introduce the active vibration isolation to the ultra-precision isolation system, and to improve the ability of the vibration isolation for the ultra-precision machine. Firstly, mathematical model was established for the hybrid vibration isolation system, in which air-spring was used as passive vibration isolation element and electro-magnetic actuator as active vibration isolation element. Secondly, two-dimension fuzzy controller has been designed in which machine vibration velocity was used as system error while machine vibration acceleration as the change of system error. At last, the synthetic experiment has been done for the active vibration isolation system of the ultra-precision turning machine. The result of the single actuator experiment which has been done in X, Y, Z directions indicates the vibration acceleration not only in actuator acting direction but also in other two directions are to be controlled in the same order.