STUDY ON ACTIVE VIBRATION ISOLATION SYSTEM FORTHE BED OF ULTRA-PRECISION TURNING MACHINE

摘要

The aim of this thesis about active isolation vibration systemrnfor the bed of ultra-precision turning machine is to introducernthe active vibration isolation to the ultra-precision isolationrnsystem, and to improve the ability of the vibration isolationrnfor the ultra-precision machine. Firstly, mathematical modelrnwas established for the hybrid vibration isolation system, inrnwhich air-spring was used as passive vibration isolationrnelement and electro-magnetic actuator as active vibrationrnisolation element. Secondly, two-dimension fuzzy controllerrnhas been designed in which machine vibration velocity wasrnused as system error while machine vibration acceleration asrnthe change of system error. At last, the synthetic experimentrnhas been done for the active vibration isolation system of thernultra-precision turning machine. The result of the singlernactuator experiment which has been done in X, Y, Zrndirections indicates the vibration acceleration not only inrnactuator acting direction but also in other two directions are tornbe controlled in the same order.