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Detailed Kinetic Modeling of Gas Phase Reactions in Chemical Vapor Deposition of Carbon from Light Hydrocarbons

机译：轻质烃化学气相沉积气相反应的详细动力学建模

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《International carbon conference》|2006年||共7页
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中图分类碳C;
关键词
Chemical vapor deposition; Pyrolysis; Reaction kinetics;

机译：化学气相沉积;热解;反应动力学;

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1. Analysis of gas phase compounds in chemical vapor deposition of carbon from light hydrocarbons [J] . Koyo Norinaga, Olaf Deutschmann, Klaus J. Huttinger Carbon: An International Journal Sponsored by the American Carbon Society . 2006,第9期

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2. Kinetic modeling of tungsten silicide chemical vapor deposition from WF6 and Si2H6: Determination of the reaction scheme and the gas-phase reaction rates [J] . Saito T, Oshima K, Shimogaki Y, Chemical Engineering Science . 2007,第22期

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3. Analysis of pyrolysis products from light hydrocarbons and kinetic modeling for growth of polycyclic aromatic hydrocarbons with detailed chemistry [J] . Koyo Norinaga, Olaf Deutschmann, Naomichi Saegusa, Journal of Analytical & Applied Pyrolysis . 2009,第1期

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4. Detailed Kinetic Modeling of Gas Phase Reactions in Chemical Vapor Deposition of Carbon from Light Hydrocarbons [C] . International carbon conference . 2006

机译：轻质烃化学气相沉积气相反应的详细动力学建模
5. GAS PHASE CHEMICAL KINETICS AND THE DETAILED MODELING OF CHEMICAL VAPOR DEPOSITION PROCESSES (SILICON EPITAXY, DICHLOROSILANE). [D] . SWIHART, MARK THOMAS. 1997

机译：气相化学动力学和化学气相沉积过程的详细建模（硅表位，二氯硅烷）。
6. Chemical Conversion Pathways and Kinetic Modeling for the OH-Initiated Reaction of Triclosan in Gas-Phase [O] . Xue Zhang, Chenxi Zhang, Xiaomin Sun, 2015

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7. Detailed Kinetic Modeling of Gas-Phase Reactions in the Chemical Vapor Deposition of Carbon from Light Hydrocarbons [O] . -1

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8. Kinetics of gas-phase reactions relevant to the chemical vapor deposition of indium compounds [R] . Allendorf, M. D. , McDaniel, A. H. 1998

机译：与铟化合物的化学气相沉积相关的气相反应动力学

Detailed Kinetic Modeling of Gas Phase Reactions in Chemical Vapor Deposition of Carbon from Light Hydrocarbons

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