CMOS-compatible Biological Surface Plasmon Resonance Nanosensor

摘要

A CMOS-compatible chemical and biological SPR nanosensor is reported. This nanosensor is based on transmission-type surface plasmon resonance (SPR) spectroscopy and can create an effective platform for monitoring binding events on micro- or nano-patterned receptor arrays. It can be integrated with other electronic circuits using standard CMOS process to receive signals and to perform signal processing on one chip. The nanosensor provides a pathway to an extremely small, simple, light, disposable and ultrasensitive sensing chip for environmental and clinical diagnostic applications.