Numerical Capacitance Calculation for MEMS Pressure Sensor by Method of Moments

摘要

A Method of Moment algorithm to calculate the sensor capacitance will be presented. This paper uses the examples of a sensor with axial symmetry, yet the algorithm holds valid for non-symmetric cases as well. The algorithm is not language-specific and can be implemented in virtually all programming languages. It will enable design of high resolution, passive RF pressure sensors that depend on sensitive and yet accurate capacitance read-out.