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Electrostatic Artificial Eyelid Actuator as an Analog Micromirror Device

机译:静电人造眼睑执行器作为模拟微镜器件

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An electrostatic MEMS actuator is described for use as an analog micromirror device (AMD) for high performance, broadband, hardware-in-the-loop (HWIL) scene generation. Current state-of-the-art technology is based on resistively heated pixel arrays. As these arrays drive to the higher scene temperatures required by missile defense scenarios, the power required to drive the large format resistive arrays will ultimately become prohibitive. Existing digital micromirrors (DMD) are, in principle, capable of generating the required scene irradiances, but suffer from limited dynamic range, resolution and flicker effects. An AMD would be free of these limitations, and so represents a viable alternative for high performance UV/VIS/IR scene generation. An electrostatic flexible film actuator technology, developed for use as "artificial eyelid" shutters for focal plane sensors to protect against damaging radiation, is suitable as an AMD for analog control of projection irradiance. In shutter applications, the artificial eyelid actuator contained radius of curvature as low as 25μm and operated at high voltage ( > 200V). Recent testing suggests that these devices are capable of analog operation as reflective microcantilever mirrors appropriate for scene projector systems. In this case, the device would possess larger radius and operate at lower voltages (20-50V). Additionally, frame rates have been measured at greater than 5kHz for continuous operation. The paper will describe the artificial eyelid technology, preliminary measurements of analog test pixels, and design aspects related to application for scene projection systems. We believe this technology will enable AMD projectors with at least 512~2 spatial resolution, non-temporally-modulated output, and pixel response times of < 1.25ms.
机译:静电MEMS致动器描述为用于高性能,宽带,硬件循环(HWIL)场景生成的模拟微镜器件(AMD)。目前的最先进的技术基于电阻加热像素阵列。随着这些阵列驱动到导弹防御情景所需的较高场景温度,驱动大型格式电阻阵列所需的电源最终将变得越来越高。原则上,现有的数字微镜(DMD)能够生成所需的场景辐照,但遭受有限的动态范围,分辨率和闪烁效果。 AMD将没有这些限制,因此代表了高性能UV / VI / IR场景生成的可行替代方案。静电柔性薄膜致动器技术开发为用于焦平面传感器的“人造眼睑”百叶窗,以防止损坏辐射,适用于投影辐照度的模拟控制的AMD。在快门应用中,人造眼睑致动器包含低至25μm的曲率半径,并以高压(> 200V)操作。最近的测试表明,这些设备能够作为适用于场景投影仪系统的反射微电机镜的模拟操作。在这种情况下,该设备将具有较大的半径并在较低电压(20-50V)下操作。另外,对于连续操作,帧速率已经大于5kHz。本文将描述人造眼睑技术,模拟测试像素的初步测量,以及与场景投影系统的应用相关的设计方面。我们认为,这项技术将使AMD投影仪至少具有512〜2个空间分辨率,非时间调制输出和<1.25ms的像素响应时间。

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