Micromirror device, e.g. for micro-optical bank, has micromirror connected with translucent elastomer membrane, where mirror is pressure actuated and angle or translational position of mirror is varied

摘要

The device has a carrier (5) with an opening (4) and a micro channel running from the opening to an end of the carrier. A base substrate (10) closes one side of the opening and both sides of the channel. A translucent elastomer membrane (3) closes the other opened side of the opening. A micromirror (2) is firmly connected with the membrane, where light reflecting surface of the mirror is provided within or outside the opening. The mirror (2) is pressure actuated and an angle or translational position of the mirror is varied. The surface is produced by a gold or aluminum metallization.