Micromirror with Thin Film Torsion Bar and Vertical Comb using Tensile Poly-Si

摘要

A microminor device is developed using the tensile poly-Si thin film. The compliant torsion bar and the vertical comb are prepared. The large stress can be obtained by the crystallization of amorphous Si (a-Si) film. Si film has the same thermal expansion coefficient with that of the substrate. This will stabilize the temperature characteristics