Compact Modelling of High-Voltage LDMOS Devices

摘要

In this paper various modelling approaches for Laterally Double-Diffused MOS (LDMOS) devices are discussed. Characterisation results for the new compact LDMOS model called MOS Model 20 are presented. Measurements of the dc-current, its conductances and the capacitances obtained from Y -parameters of an LDMOS device, show that MOS Model 20 provides accurate descriptions in all regimes of operation. For future developments, the inclusion of quasi-saturation in MOS Model 20 is demonstrated. Finally, the consequence of the lateral non-uniformity of the LDMOS device for compact modelling is discussed.